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Line/Space  6/6~10/10

SX5300 is a high-performance AOI that can handle fine pattern with L/S up to 6/6.
High precision determination is possible with measurement length algorithm.

Features of SX5300

Inspection time (※)

・Please contact us regarding inspection time.

Workpiece size

Maximum workpiece size 610mm×610mm


Option Built-in review camera
loader and unloader

Equipment dimensions

Equipment dimensions (mm) W=1113, D=2290, H=1972 Weight:2000Kg
① Signal tower mounted at the top of equipment is not included in dimensions (H).
② Mounting angle of monitor/keyboard/mouse mounted on SX5300 is such that position can be adjusted so that the user can easily use the equipment. Therefore, dimension (W) will change accordingly.
Therefore, dimension (W) of the aforementioned series doesn’t include the dimension of monitor/keyboard/mouse.
③ Weight of equipment is the approximate weight.


Please contact us for any customization requirements.

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